Monitoring the loss of mass or the volume recessed into a waveguide by resonant signal principle: Nano-inscribed slots in DUV210 micro-resonators

The goal of this paper is to study the impact a differential mass loss or lack material (void) directly located into core structure matter together with possibility measuring its effect by resonant signal surface at optical frequencies. To end, focus has been on evolution effective indices eigenvalues micro-resonators as relevant models. Specific was measured way principle. Then, specific families resonators have designed and shaped several slits nano-inscribed upon them. light then characterized pseudo-period while considering whole geometry, taking account void; thus, it contains information regarding pre-defined recessed volume. carried out first controlling deep UV technology onto an organic so fabricate family slotted before assessing index system that inversely proportional free spectral range. Experimentally, design measurement platform made possible measure given within cyclic resonators. Experimental measurements confirm previous simulations demonstrating convergence ranging from 0.09 0.39%. Accordingly, results allow us validate quantified description hollowed volume (or waveguide) regard spatial signal. Key words: Deep UV210 polymer, slots, micro-resonators, resonance monitoring, material, void characterizations.